Division of Environmental Physics - User: anka
Faculty of Mathematics, Physics and Informatics, Comenius University Bratislava

Investigations into deposit forming during aluminium etching in CCl4 plasma

Martišovitš V., Miertušová J., Šurda V., Trnovec J., Zahoran M.
Acta Physica Slovaca 36 (2), 116 (1986)

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Abstract: