Faculty of Mathematics, Physics and Informatics, Comenius University Bratislava |
Effect of chemical reaction stoichiometry on the pressure variation in the etch chamber during etching of aluminiumMartišovitš V., Zahoran M., Košinár I., Trnovec J. |
||
Abstract:
|
||
Citations:
|
![]() |
HOME |
STAFF |
RESEARCH |
PUBLICATIONS |
STUDENTS |
LINKS |
CONTACT
|
PhD opportunities
|
![]() |
User: igor Logout |